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【PDF】A global model for SF6 plasmas coupling reaction kinetics in

Phys. 42 (2009) 055209 (15pp) JOURNAL OF PHYSICS D: APPLIED PHYSICS doi:10.1088/0022-3727/42/5/055209 A global model for SF6 plasmas coupling

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【PDF】A global model for SF6 plasmas coupling reaction kinetics in

Phys. 42 (2009) 055209 (15pp) JOURNAL OF PHYSICS D: APPLIED PHYSICS doi:10.1088/0022-3727/42/5/055209 A global model for SF6 plasmas coupling

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【PDF】A global model for SF6 plasmas coupling reaction kinetics in

Phys. 42 (2009) 055209 (15pp) JOURNAL OF PHYSICS D: APPLIED PHYSICS doi:10.1088/0022-3727/42/5/055209 A global model for SF6 plasmas coupling

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Phys. 42 (2009) 055209 (15pp) JOURNAL OF PHYSICS D: APPLIED PHYSICS doi:10.1088/0022-3727/42/5/055209 A global model for SF6 plasmas coupling

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Phys. 42 (2009) 055209 (15pp) JOURNAL OF PHYSICS D: APPLIED PHYSICS doi:10.1088/0022-3727/42/5/055209 A global model for SF6 plasmas coupling

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Characteristics of attachment instabilities in SF6 inductively coupled plasmas are experimentally studied under different coupling intensities. Experimental

【PDF】A global model for SF6 plasmas coupling reaction kinetics in

Phys. 42 (2009) 055209 (15pp) JOURNAL OF PHYSICS D: APPLIED PHYSICS doi:10.1088/0022-3727/42/5/055209 A global model for SF6 plasmas coupling

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【PDF】A global model for SF6 plasmas coupling reaction kinetics in

Phys. 42 (2009) 055209 (15pp) JOURNAL OF PHYSICS D: APPLIED PHYSICS doi:10.1088/0022-3727/42/5/055209 A global model for SF6 plasmas coupling

【LRC】A global model for SF6 plasmas coupling reaction kinetics in

Phys. 42 (2009) 055209 (15pp) JOURNAL OF PHYSICS D: APPLIED PHYSICS doi:10.1088/0022-3727/42/5/055209 A global model for SF6 plasmas coupling

【PDF】A global model for SF6 plasmas coupling reaction kinetics in

Phys. 42 (2009) 055209 (15pp) JOURNAL OF PHYSICS D: APPLIED PHYSICS doi:10.1088/0022-3727/42/5/055209 A global model for SF6 plasmas coupling